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50mm,
100mm, 150mm, 200mm Z-movement |
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±10mm of X/Y movement
by micrometer |
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Large Bore-sized
welded bellow |
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2.75"
CF Standard mounting flange
(4 1/2", 6"option) |
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Fully UHV compatible |
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Bakeable upto 200℃ |
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CMX
Series of our standard XYZ manipulators
are large bore stages which incorporate
trips axis
movement. The X, Y travels are driven
by Mitutoyo micrometers.
The Z axis employs a handwhee l and
worm gear reduction drive mechanism
with displacement.
measured along the upto 200mm are available. |
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Flange
: 304 Stainless steel, conflat
type |
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Actuator body :
Anodized aluminum |
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Bellows : 304SS
or AM350 |
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Vacuum : 5 × 10-11Torr |
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Temperature : -20℃
to 200℃ |
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Model
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Mounting flange
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Bore
size
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Linear
travel
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Bellows
Port Dim(A)
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Overall
Dim(B) |
Min. |
Max. |
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CMX-275-50 |
2.75"
CF |
36 mm
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50 mm
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85 mm
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135 mm
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209 mm |
CMX-275-100 |
2.75"
CF |
36 mm
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100 mm
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102 mm
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202 mm
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276 mm |
CMX-275-150 |
2.75"
CF |
36 mm
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150 mm
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142 mm
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292 mm
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366 mm |
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| ※ All dimensions
and parts may be changed without notice |
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