 |
| |
|
 |
| |
 |
< 7㎛ spatial
resolution |
|
High sensitivity electrostatic
detection optics |
|
Dual beam Charge neutralization |
|
Robotic sample handling |
|
Samples upto 100 mm diameter |
|
High speed snapshot depth
profiling |
|
| |
|
 |
| |
|
10㎛
spatial resolution |
|
max.
0.5 eV of energy resolution |
|
16 channeltron
detector |
|
1,000,000
cps of sensitivity |
|
|
| |
|
 |
| |
|
High
resolution secondary
electron and
AES images |
|
Less
than 6nm of electron
beam diameter |
|
Coaxial
geometry of electron
column and
Cylinderical Mirror
Analyzer |
|
High
performance floating
column ion gun |
|
MultiPak
Software Package |
|
|
| |
|
|
 |
| |
|
Over
10,500M/Δm mass resolution
at SIH |
+ |
|
Over
9,000M/Δm mass resolution
at PET |
|
Beam
Diameter; 130nm/ 0.7 ㎛ |
|
Upto
4 types of ion gun available;
C60,
Ar, Cs,O₂ |
|
|
| |
|
 |
| |
|
Automated
Multi-Sample depth Profiling |
|
High Sensitive
Hemispherical analyzer |
|
10kV LaB6
Scanning Electron Gun |
|
Scintillation
defector for SEM image |
|
Floating Argon
Ion Gun |
|
|
| |
|
 |
| |
|
unique
secondary ion extraction
system |
|
Quadrupole
dynamic SIMS |
|
High transmission
yield |
|
Low detection
limit |
|
|
|
|
|
