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> 제품소개 > UHV COMPONENT > High Precision XYZ Manipulator
The
HPMX high precision XYZ Manipulater
is built up from a selection of modules
to allow a wide
range of application. The series is
a high precision performance that uses
a single, edge welded
bellows for X, Y and Z movements. The
X, Y stage uses cross roller bearing
slides and the Z slide
uses re-circulating ball guides. These
rolling parts extend high preasion and
long life.
Precision micrometers accurate the X,
Y and Z manual movement.
Full
UHV compatible, Bakeable to 200℃ and
compatible with all of our sample handling
accessories.
Precision single
bellows translator with mounting in
any orientation
Standard mounting
flange is 8" CF O.D
The traveling
flange is 4.5" O.D
Z-travels upto
1000mm (Possible to order made size)
X, Y travel
of ±12.5mm (±25mm option)
Z resolution
1/100, XY resolution 1/100
Model
(Wide Bore High
Precision Z Slide)
Z
Travel
Bellows Port
Dim. (A)
Overall Dim. (C)
Bellows
Bore
Option
Min.
Max.
WHPZ
100
100
168
268
381
66
Feedthrough
Tube
WHPZ
200
200
219
419
532
WHPZ
400
400
322
722
835
WHPZ
600
600
420
1020
1133
WHPZ
800
800
523
1323
1436
WHPZ
1000
1000
622
1622
1735
XY
Stage
XY Motion
Height
(B)
Base Flange
Top Flange
Bellows
Bore
Base Flange
Holes
HPXY-450/600-1
±12.5
140
O.D152CF
(6")
O.D114CF (4.5")-φ66
M8 Tapped Hole
90
M8
HPXY-450/800-1
O.D203CF
(8")
φ8.5
HPXY-450/600-2
±25
180
O.D152CF
(6")
O.D114CF (4.5")-φ66
M8 Tapped Hole
105
M8
HPXY-450/800-2
O.D203CF
(8")
φ8.5
*
Options
2nd
rotating drives( 90 )
360 rotation
option
Precision
tilt adaptor
Motorizing
option
Special
sample holders option
Heating
option(Resistive or E-beam)
※ All dimensions
and parts may be changed without notice
